| 摘要 |
A method of manufacturing an overheat or fire alarm detection system comprises the steps of micromachining a pressure sensor 10, and securing a sensor tube (20,Fig.2) in fluid communication with the pressure sensor 10. The sensor tube may comprise a hollow tube (24,Fig.2) containing a material that evolves gas upon heating. The micromachining step may comprise doping at least a portion (13,Fig.1c) of a first layer 12; forming a cavity (19,Fig.1c) at least partially within the doped portion (13,Fig.1c) and forming a deformable diaphragm 14 over the cavity. The micromachining may comprise forming at least two recesses having different depths whereby the deeper the cavity, the more pressure will be required to deform the diaphragm sufficiently to close an electrical terminal within the cavity and trigger an alarm. The use of micromachining techniques, micro systems technology (MST) or micro-electro mechanical system (MEMS) technology for production of the pressure sensor 10 results in a sensor comprising much smaller and more accurate dimensions, and thus a more accurate and reliable response to changes in pressure. |
