| 摘要 |
A semiconductor wafer includes a semiconductor substrate, an optical filter formed on or above the semiconductor substrate, and a light detection region formed in the semiconductor substrate, with the Poisson ratio VS, Young's modulus ES, the radius r, and the thickness b of the semiconductor substrate, stress à in the optical filter, and the thickness d of the optical filter satisfy a relationship 1.0×10 -3 ‰¥{3×r 2 ×d×(1-VS)×Ã}/(ES×b 2 ). |
