| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a three-dimensional shape measuring device that can perform calibration without depending on the resolution of a camera and further has good usability in calibration work.SOLUTION: A three-dimensional shape measuring device includes: a calibration block in which four on-step planar surfaces are provided at a stair-shaped part, on each of the on-step planar surfaces, a contour not in parallel with a bright line is provided, and patterns having different reflectance are formed with the contour as a border; a storage unit 60 that stores therein reference data on the height dimension from the bottom of the calibration block and positional coordinate of the pattern; a mounting table 30 where the calibration block is mounted; an imaging unit 20 that images the bright line; a mounting table driving unit 90 that moves the mounting table 30; a feature point detection unit 70 that detects a feature point from the imaged bright line; and a calibration data generation unit 80 that calculates vertex coordinates of geometrical patterns from feature point coordinates in a picked-up image of the detected feature point and generates calibration data on the basis of the vertex coordinates and the reference data.</p> |
