| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To obtain an electrostatic chuck in which a gas passage is formed by one layer and a manufacturing method for the electrostatic chuck, and to obtain a substrate temperature controlling/fixing device having the electrostatic chuck. <P>SOLUTION: The manufacturing method for an electrostatic chuck having an electrode and an annular gas passage in a substrate mounting base material includes a through hole formation step for forming a plurality of adjoining through holes 180 and coupling parts 190 in a first green sheet 102, a temporary bonding step for bonding the first green sheet 102 temporarily onto a second green sheet 101 and closing one side of the plurality of through holes 180, a coupling part removing step for forming an annular through hole 181 by removing the coupling parts 190 and integrating the plurality of through holes 180 following to the temporary bonding step, a gas passage formation step for forming an annular gas passage only in the first green sheet 102 by bonding a third green sheet temporarily onto the first green sheet 102 and closing the other side of the annular through hole 181, and a base material formation step for forming the base material by calcining each green sheet bonded temporarily. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
