| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To reduce variations of the film thickness in each position of a substrate where droplets collide and improve the process quality of the substrate. <P>SOLUTION: Droplets of a process liquid are respectively injected from multiple injection ports 28 to multiple injection positions on an upper surface of the substrate. Concurrently with the injection of the process liquid, a protection liquid is discharged from multiple discharge ports 35 to multiple liquid adhering positions on the upper surface of the substrate. The protection liquid discharged from the multiple discharge ports 35 form multiple liquid films. The multiple liquid films respectively cover the different injection positions. The droplets of the process liquid are injected to the injection positions covered by the liquid films of the protection liquid. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
