| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide: adjusting means of an adjusting film considering effect of a temperature characteristic curve of a resonance frequency, for solving the problem that the temperature characteristics of the resonance frequency may change by removing the adjusting film for adjusting the resonance frequency formed on a piezoelectric vibrator, thus deviating from desired temperature characteristics; and means for changing the temperature characteristic curve to achieve the desired temperature characteristics. <P>SOLUTION: A method of manufacturing a piezoelectric vibrator includes the steps of: measuring a resonant frequency of the piezoelectric vibrator on which an excitation electrode and adjusting films 25, 26, 27 are formed; measuring or estimating a primary temperature coefficient of the piezoelectric vibrator on which the excitation electrode and the adjusting films are formed; determining a portion and quantity of the adjusting films to be removed so as to achieve a desired resonance frequency and a desired primary temperature coefficient from the measured resonance frequency and the measured or estimated primary temperature coefficient; and removing the adjusting film of the portion and quantity of the adjusting film to be removed as determined in the previous step. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
