| 摘要 |
<p>The method involves acquiring intensity interferogram from a monochromatic incident beam, where the incident beam is emitted towards mirrors (M1, M2) of a static interferometer (1). Operating heights of surfaces (S1, S2, S3) of the former mirrors are estimated by solving an equation system linking the measured intensity with the operating heights, where the system exploits correlations and geometric dependencies of the mirrors. An optical path difference in the interferometer is deduced from the estimated operating heights of the surfaces of the former mirror.</p> |
