| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a spectrometric measurement apparatus having high connection reliability in a wavelength variable interference filter. <P>SOLUTION: There is provided a spectroscopic camera which comprises: a telecentric optical system 11 to which light to be measured is incident; a first dichroic mirror 121 which separates infrared light of the light to be measured into a first optical path L1 and separates visible light into a second optical path L2; a wavelength variable interference filter 5 having a fixed substrate which is disposed in the first optical path L1 and has a fixed reflection film, a movable substrate having a movable reflection film and an electrostatic actuator for changing the gap amount between the reflection films by deflecting the movable substrate by voltage application; a second dichroic mirror 126 for emitting the infrared light of the first optical path L1 and the visible light of the second optical path L2; and an imaging part 13 for imaging the light to be measured. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
