发明名称 |
Semiconductor nanostructure |
摘要 |
The present disclosure relates to a semiconductor nanostructure. The semiconductor nanostructure includes a substrate and at least one ridge. The substrate includes a first crystal plane and a second crystal plane perpendicular to the first crystal plane. The at least one ridge extends from the first crystal plane along a crystallographic orientation of the second crystal plane. A width of cross section at a position of half the height of the at least one ridge is less than 17 nm. The semiconductor nanostructure is a patterned structure which can lead to generate a quantum confinement effect, such that the impurity scattering phenomenon is reduced. |
申请公布号 |
US9147728(B2) |
申请公布日期 |
2015.09.29 |
申请号 |
US201012842195 |
申请日期 |
2010.07.23 |
申请人 |
Tsinghua University;HON HAI PRECISION INDUSTRY CO., LTD. |
发明人 |
Wu Jian;Liu Zheng;Duan Wen-Hui;Gu Bing-Lin |
分类号 |
H01L29/12;H01L29/06;B82Y10/00;H01L29/04;H01L29/15 |
主分类号 |
H01L29/12 |
代理机构 |
Novak Druce Connolly Bove + Quigg LLP |
代理人 |
Novak Druce Connolly Bove + Quigg LLP |
主权项 |
1. A semiconductor nanostructure comprising:
a substrate comprising a first crystal plane and a second crystal plane substantially perpendicular to the first crystal plane; and at least one ridge extending from the first crystal plane along a crystallographic orientation of the second crystal plane, wherein a width of cross section at a position of half the height of the at least one ridge is less than 17 nm, and a thickness of the substrate is in a range from about a thickness of five atom layers to about a thickness of fifteen atom layers of a material of the substrate, and the substrate has a quantum confinement effect. |
地址 |
Beijing CN |