发明名称 Semiconductor nanostructure
摘要 The present disclosure relates to a semiconductor nanostructure. The semiconductor nanostructure includes a substrate and at least one ridge. The substrate includes a first crystal plane and a second crystal plane perpendicular to the first crystal plane. The at least one ridge extends from the first crystal plane along a crystallographic orientation of the second crystal plane. A width of cross section at a position of half the height of the at least one ridge is less than 17 nm. The semiconductor nanostructure is a patterned structure which can lead to generate a quantum confinement effect, such that the impurity scattering phenomenon is reduced.
申请公布号 US9147728(B2) 申请公布日期 2015.09.29
申请号 US201012842195 申请日期 2010.07.23
申请人 Tsinghua University;HON HAI PRECISION INDUSTRY CO., LTD. 发明人 Wu Jian;Liu Zheng;Duan Wen-Hui;Gu Bing-Lin
分类号 H01L29/12;H01L29/06;B82Y10/00;H01L29/04;H01L29/15 主分类号 H01L29/12
代理机构 Novak Druce Connolly Bove + Quigg LLP 代理人 Novak Druce Connolly Bove + Quigg LLP
主权项 1. A semiconductor nanostructure comprising: a substrate comprising a first crystal plane and a second crystal plane substantially perpendicular to the first crystal plane; and at least one ridge extending from the first crystal plane along a crystallographic orientation of the second crystal plane, wherein a width of cross section at a position of half the height of the at least one ridge is less than 17 nm, and a thickness of the substrate is in a range from about a thickness of five atom layers to about a thickness of fifteen atom layers of a material of the substrate, and the substrate has a quantum confinement effect.
地址 Beijing CN