发明名称 |
Method for enhancing surface characteristics of a fingerprint sensor and structure made of the same |
摘要 |
A method for enhancing surface characteristics of a fingerprint sensor and a protective structure made according to the method are disclosed. The method includes the steps of: providing a fingerprint sensor having a number of detecting elements beneath a top surface of the fingerprint sensor, the detecting element is used to detect changes of capacitance over a portion of a finger; forming a metal mesh layer over the top surface of the fingerprint sensor, wherein metal lines of the metal mesh layer are formed periodically and each of them is located between two adjacent detecting elements; forming a passivation layer on the metal mesh layer to shape a concave-convex top surface; and filling concave portions of the passivation layer with a Diamond-Like Carbon (DLC) material. A convex portion of the passivation layer is substantially above the metal line of the metal mesh layer. |
申请公布号 |
US9147100(B1) |
申请公布日期 |
2015.09.29 |
申请号 |
US201414273743 |
申请日期 |
2014.05.09 |
申请人 |
Sunasic Technologies Inc. |
发明人 |
Lin Chi-Chou;He Zheng-Ping |
分类号 |
H01L27/14;G06K9/00;H01L23/31;H01L23/29;H01L27/02;H01L31/0236 |
主分类号 |
H01L27/14 |
代理机构 |
Law Office of Michael Chen |
代理人 |
Chen Che-Yang;Law Office of Michael Chen |
主权项 |
1. A method for enhancing surface characteristics of a fingerprint sensor, comprising the steps of:
providing a fingerprint sensor having a plurality of detecting elements beneath a top surface thereof, the detecting element being used to detect changes of capacitance over a portion of a finger; forming a metal mesh layer over the top surface of the fingerprint sensor, wherein metal lines of the metal mesh layer are formed periodically and each of them is located between two adjacent detecting elements; forming a passivation layer on the metal mesh layer to shape a concave-convex top surface; and filling concave portions of the passivation layer with a Diamond-Like Carbon (DLC) material, wherein a convex portion of the passivation layer is substantially above the metal line of the metal mesh layer. |
地址 |
New Taipei TW |