发明名称 Scribing method using blasting machine
摘要 To provide a scribing method by blasting that allows forming a groove at high accuracy without masking, a blasting machine that includes an ejection nozzle having a slit-shaped ejection opening with a width of 10 to 500 μm and a length of 5 to 5000 times the width, and an abrasive with a median diameter equal to or less than one-half of a width of the ejection opening of the ejection nozzle and with a maximum particle diameter smaller than a width of the ejection opening are used; and the abrasive is ejected together with compressed gas on a surface of a workpiece at an ejection distance of 0.1 to 3.0 mm and an ejection pressure of 0.2 MPa to 0.6 MPa without masking so that 0.25 cm3 or less of the abrasive is included per 1000 cm3 of the compressed gas discharged from the ejection nozzle.
申请公布号 US9144884(B2) 申请公布日期 2015.09.29
申请号 US201313964326 申请日期 2013.08.12
申请人 FUJI MANUFACTURING CO., LTD. 发明人 Mase Keiji;Hinata Masato
分类号 B24C1/04;B24C5/04 主分类号 B24C1/04
代理机构 Cooper Legal Group, LLC 代理人 Cooper Legal Group, LLC
主权项 1. A scribing method by blasting, comprising: using a blasting machine that includes an ejection nozzle, the ejection nozzle having a slit-shaped ejection opening with a width of 10 μm to 500 μm and a length of 5 to 5000 times the width; and an abrasive with a median diameter equal to or less than one-half of the width of the ejection opening of the ejection nozzle, the abrasive with a maximum particle diameter smaller than the width of the ejection opening; and ejecting the abrasive together with compressed gas on a surface of a workpiece without masking at an ejection distance of 0.1 mm to 3.0 mm and at an ejection pressure of 0.2 MPa to 0.6 MPa so that 0.25 cm3 or less of the abrasive is included per 1000 cm3 of the compressed gas discharged from the ejection nozzle.
地址 Tokyo JP