发明名称 Piezoelectric laminate, surface acoustic wave device, thin-film piezoelectric resonator, and piezoelectric actuator
摘要 A piezoelectric laminate including a base and a first piezoelectric layer formed above the base and including potassium sodium niobate. The first piezoelectric layer is shown by a compositional formula (KaNa1-a)xNbO3, “a” and “x” in the compositional formula being respectively 0.1<a<1 and 1≦x≦1.2.
申请公布号 US9148116(B2) 申请公布日期 2015.09.29
申请号 US200912556232 申请日期 2009.09.09
申请人 Seiko Epson Corporation 发明人 Ueno Mayumi;Higuchi Takamitsu;Kijima Takeshi
分类号 B41J2/45;H03H9/02;H01L41/08;H01L41/187;H01L41/318 主分类号 B41J2/45
代理机构 Harness, Dickey & Pierce, P.L.C. 代理人 Harness, Dickey & Pierce, P.L.C.
主权项 1. An inkjet recording head including a piezoelectric actuator, the piezoelectric actuator comprising: a lower electrode; a piezoelectric layer formed above the lower electrode and having a compositional formula (KaNa1-a)xNbO3; and an upper electrode formed above the piezoelectric layer; wherein “a” is 0.56<a<0.85 and “x” is 1.04<x≦1.08.
地址 JP