发明名称 |
Piezoelectric laminate, surface acoustic wave device, thin-film piezoelectric resonator, and piezoelectric actuator |
摘要 |
A piezoelectric laminate including a base and a first piezoelectric layer formed above the base and including potassium sodium niobate. The first piezoelectric layer is shown by a compositional formula (KaNa1-a)xNbO3, “a” and “x” in the compositional formula being respectively 0.1<a<1 and 1≦x≦1.2. |
申请公布号 |
US9148116(B2) |
申请公布日期 |
2015.09.29 |
申请号 |
US200912556232 |
申请日期 |
2009.09.09 |
申请人 |
Seiko Epson Corporation |
发明人 |
Ueno Mayumi;Higuchi Takamitsu;Kijima Takeshi |
分类号 |
B41J2/45;H03H9/02;H01L41/08;H01L41/187;H01L41/318 |
主分类号 |
B41J2/45 |
代理机构 |
Harness, Dickey & Pierce, P.L.C. |
代理人 |
Harness, Dickey & Pierce, P.L.C. |
主权项 |
1. An inkjet recording head including a piezoelectric actuator, the piezoelectric actuator comprising:
a lower electrode; a piezoelectric layer formed above the lower electrode and having a compositional formula (KaNa1-a)xNbO3; and an upper electrode formed above the piezoelectric layer; wherein “a” is 0.56<a<0.85 and “x” is 1.04<x≦1.08. |
地址 |
JP |