发明名称 PRODUCTION METHOD AND PRODUCTION DEVICE FOR SEMICONDUCTOR DEVICES
摘要 This method is a production method for semiconductor devices obtained by sealing semiconductor elements by using a sealing sheet. The production method for semiconductor devices comprises: a preparation step in which a sealing sheet and a plurality of semiconductor elements are prepared; a sealing step in which, after the preparation step, the plurality of semiconductor elements are sealed as a batch, by using the sealing sheet; and a recovery step in which, after the sealing step, the sealing sheet and the plurality of semiconductor elements are recovered.
申请公布号 SG11201505565Q(A) 申请公布日期 2015.09.29
申请号 SG11201505565Q 申请日期 2014.01.22
申请人 NITTO DENKO CORPORATION 发明人 MATSUSHITA, TAKAO;MORI, SHINICHIRO
分类号 H01L21/56;H01L33/52 主分类号 H01L21/56
代理机构 代理人
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