Micromechanical digital loudspeaker

摘要

A digital loudspeaker includes a substrate, a first stator fixed with respect to the substrate, a second stator fixed with respect to the substrate and spaced at a distance from the first stator, and a membrane between the first stator and the second stator. The membrane is displaceable between a first position in which the membrane mechanically contacts the first stator and a second position in which the membrane mechanically contacts the second stator. The first stator and the second stator are arranged to electrostatically move the membrane from a rest position spaced apart from the first position and the second position to the first position and the second position, respectively.

主权项

1. A digital loudspeaker comprising:
a substrate; a first stator fixed with respect to the substrate; a second stator fixed with respect to the substrate and spaced at a distance from the first stator; and a membrane between the first stator and the second stator and displaceable between a first position in which the membrane mechanically contacts the first stator and a second position in which the membrane mechanically contacts the second stator, wherein the first stator and the second stator are arranged to electrostatically move the membrane between a rest position spaced apart from the first position and the second position and the first position and the second position, and wherein at least one of the first stator and the second stator comprises at least one elevation protruding from a surface thereof facing the membrane, wherein the membrane mechanically contacts the first stator and the second stator substantially at the elevation, or wherein the membrane comprises at least one elevation protruding from a membrane surface in a direction of at least one of the first stator and the second stator.