Photoconductive element, lens, terahertz emission microscope and method of producing device

摘要

[Object] To provide a terahertz emission microscope being capable of improving a detection accuracy of a terahertz electromagnetic wave, a photoconductive element and a lens used therefor, and a method of producing a device.;[Solving Means] A photoconductive element includes a base material, electrodes and a film material. The base material has an incident surface on which a terahertz electromagnetic wave is incident, the terahertz electromagnetic wave generated by irradiating a device to be observed with a pulse laser generated from a light source. The electrodes are formed on the base material and detect the terahertz electromagnetic wave incident on the incident surface of the base material. The film material is formed on the incident surface of the base material, transmits the terahertz electromagnetic wave and reflects the pulse laser.

主权项

1. A photoconductive element, comprising:
a base material having an incident surface on which a terahertz electromagnetic wave is incident, the terahertz electromagnetic wave generated by irradiating a device to be observed with a pulse laser generated from a light source; electrodes formed on the base material for detecting the terahertz electromagnetic wave incident on the incident surface of the base material; and a film material formed on the incident surface of the base material for transmitting the terahertz electromagnetic wave and reflecting the pulse laser.