Piezoelectric element, liquid ejection head, and liquid ejection device

摘要

A piezoelectric element having a piezoelectric layer and electrodes. The piezoelectric layer is 3 μm or less in thickness. The piezoelectric layer is made of a piezoelectric material containing a perovskite compound including bismuth manganate ferrate and barium titanate. The piezoelectric layer is preferentially oriented with the (110) plane. A full width at half maximum of the X-ray diffraction peak attributed to the (110) plane is 0.24° or more and 0.28° or less.

主权项

1. A piezoelectric element comprising:
a piezoelectric layer; and an electrode provided on the piezoelectric layer, the electrode being oriented with the (111) plane, wherein the piezoelectric layer is made of a piezoelectric material containing a perovskite compound that includes at least bismuth manganate ferrate and barium titanate, the piezoelectric layer is preferentially oriented with the (110) plane, with a degree of orientation of the (110) plane being 60% or more, and a full width at half maximum of the X-ray diffraction peak attributed to the (110) plane is 0.24° or more and 0.28° or less, the piezoelectric layer including silicon dioxide in an amount of 0.5 mol % or more and 5 mol % or less with respect to the perovskite compound.