| 发明名称 | Crystal unit and method for fabricating the same | ||
| 摘要 | A method for fabricating a crystal unit, including a preparing step, a bonding step, and a separating step, is provided. The preparing step prepares a quartz plate and a supporting substrate with a recess that is larger than the vibrating region on a surface of the supporting substrate. The recess corresponds to a vibrating region in the crystal unit. The bonding step bonds the quartz plate to the surface of the supporting substrate such that the quartz plate is separated from the supporting substrate in the recess. The separating step separates the quartz plate into the vibrating region and the framing portion by performing dry etching on the quartz plate such that the quartz plate has a shape that connects the vibrating region to the framing portion via a supporting beam. The framing portion surrounds the vibrating region. | ||
| 申请公布号 | US9147831(B2) | 申请公布日期 | 2015.09.29 |
| 申请号 | US201213629619 | 申请日期 | 2012.09.28 |
| 申请人 | NIHON DEMPA KOGYO CO., LTD. | 发明人 | Kuroda Tomotaka;Hatano Makoto;Monoe Shigeharu |
| 分类号 | H01L41/22;C23F1/00;H01L41/332;H03H9/05;H03H9/10;H01L41/053 | 主分类号 | H01L41/22 |
| 代理机构 | Jianq Chyun IP Office | 代理人 | Jianq Chyun IP Office |
| 主权项 | 1. A method for fabricating a crystal unit, comprising: preparing a quartz plate and a supporting substrate with a recess on a surface of the supporting substrate, the recess corresponding to a vibrating region in the crystal unit, the recess being larger than the vibrating region; bonding the quartz plate to the surface of the supporting substrate such that the quartz plate is separated from the supporting substrate in the recess; separating the quartz plate into the vibrating region and a framing portion by performing dry etching on the quartz plate such that the quartz plate has a shape, the shape connecting the vibrating region to the framing portion via a supporting beam, the framing portion surrounding the vibrating region. | ||
| 地址 | Tokyo JP | ||