Piezoelectric drive element and piezoelectric drive unit

摘要

A piezoelectrically actuated element includes a composite ceramic to which an alternating electric field is applied through external electrodes that are orthogonal to the polarization direction, wherein the composite ceramic is formed from a first piezoelectric ceramic having soft spring characteristics such that the elastic constant decreases with increasing vibration velocity, and a second piezoelectric ceramic having hard spring characteristics such that the elastic constant increases with increasing vibration velocity. Even when the applied electric field is intensified to increase the vibration velocity of the piezoelectrically actuated element, the overall change in the elastic constant is minimized, and fluctuations in the resonance frequency is suppressed.

主权项

1. A piezoelectric drive element, comprising:
a composite ceramic that combines a first piezoelectric ceramic having spring characteristics such that its elastic constant decreases as a vibration speed increases, with a second piezoelectric ceramic having spring characteristics such that its elastic constant increases as a vibration speed increases; and external electrodes provided on side faces of the complex ceramics in a manner facing each other across the complex ceramics; wherein an AC electric field at and near a resonance frequency is applied to the external electrodes to drive the piezoelectric drive element, wherein the first piezoelectric ceramic is a PZT-based lead piezoelectric ceramic, BaTiO3, (Ba1/2Na1/2)TiO3, (Ba1/2K1/2)TiO3, {(K1-xNax)1-yLiy}(Nb1-z-wTazSbw)O3 (0≦x≦1, 0≦y≦0.2, 0≦z≦0.4, 0≦w≦0.2), or a solid solution ceramic containing at least two of the foregoing, while the second piezoelectric ceramic is Sr2-xCaxNaNb5O15 (0≦x≦2), Sr2NaNb5O15, Ca2NaNb5O15, Sr2KNb5O15, Ba2LiNb5O15, Ba2NaNb5O15, Ba2KNb5O15, K3Li2Nb5O15, Ba2Bi1/3Nb5O15, Pb2NaNb5O15, Pb2KNb5O15, or a solid solution ceramic of tungsten bronze type containing at least two of the foregoing, wherein a volume fraction of the first piezoelectric ceramic and second piezoelectric ceramic is adjusted to suppress resonance frequency fluctuation relative to change in vibration speed.