| 摘要 |
PROBLEM TO BE SOLVED: To provide a practical optical orientation technique capable of improving in-plane uniformity of light exposure by devising a transportation system.SOLUTION: Light from a light source 3 forming a long light emission unit is irradiated onto a radiation rang R via a polarization element unit 4. A work-piece transportation system 2 transports a substrate S in a first direction to reciprocate it while making it pass through the radiation rang R. The boundary line 40 of each polarization element 41 runs along the first direction. The work-piece transportation system 2 transports the polarization elements 41 in a second direction after transportation in an outward path and before transportation in a return path by a light radiator movement mechanism 8. Since the position of the boundary line 40 becomes displaced when seen from the substrate S, the amount of light exposure becomes uniform. |
