发明名称 ELECTRONIC DEVICE, SIGNAL DETECTION METHOD OF ELECTRONIC DEVICE, ELECTRONIC APPARATUS AND MOVING BODY
摘要 PROBLEM TO BE SOLVED: To provide a gyro sensor as an electronic device that causes reduction in detection error due to an oscillation leakage phenomena and the like, and causes increase in detection accuracy.SOLUTION: A gyro sensor 100 as an electronic device comprises: a base substrate 10 that serves as a first base substrate; a support unit 12 that is connected to the base substrate 10, is oscillatable along a plane surface including a first axis and second axis and has a first electrode; a detection unit 50 that is supported by the support unit 12, is oscillatable along a third axis and has a second electrode; a monitor electrode 56 that is disposed so as to face the first electrode, serving as a third electronode; and a detection fixing electrode 55 that is disposed so as to face the second electrode, serving as a fourth electrode.
申请公布号 JP2015169492(A) 申请公布日期 2015.09.28
申请号 JP20140043594 申请日期 2014.03.06
申请人 SEIKO EPSON CORP 发明人 KANEMOTO HIROSHI
分类号 G01C19/5762;B81B3/00;G01C19/5747;H01L29/84 主分类号 G01C19/5762
代理机构 代理人
主权项
地址