发明名称 RESIST COMPOSITION AND RESIST PATTERN FORMING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a resist composition and a resist pattern forming method.SOLUTION: The resist composition, which generates an acid upon exposure and whose solubility in a developer changes by the action of an acid, contains a base component (A) whose solubility in a developer changes by the action of an acid, and an acid generator component (B) which generates an acid upon exposure. The base component (A) contains a polymer compound (A1) having a constituent unit (a0) represented by general formula (a0-1), and the acid generator component (B) contains a compound represented by general formula (b-1) or (b-2).
申请公布号 JP2015169843(A) 申请公布日期 2015.09.28
申请号 JP20140045634 申请日期 2014.03.07
申请人 TOKYO OHKA KOGYO CO LTD 发明人 TAKAGI DAICHI;MOTOIKE NAOTO;HORI YOICHI
分类号 G03F7/039;C09K3/00;G03F7/004;G03F7/038 主分类号 G03F7/039
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