| 摘要 |
<p>PROBLEM TO BE SOLVED: To suppress electric resistance in a direction perpendicular to a piezoelectric substrate of a pad electrode.SOLUTION: An elastic wave device includes: a piezoelectric substrate 12; an interdigital electrode 14 provided on the piezoelectric substrate 12; and a pad electrode 16 which is provided on the piezoelectric substrate 12 and electrically connected to the interdigital electrode 14. The interdigital electrode 14 is a laminated film in which electric resistivity of a material of a first layer 34 that is a top layer is greater than electric resistivity of a material of a second layer 32 that is lower than the top layer by one layer. The pad electrode 16 has the same film configuration as a film configuration in the laminated film of the interdigital electrode 14 closer to the piezoelectric substrate 12 to the second layer 32, and a top face of a second layer 42 that is a layer corresponding to the second layer 32, is exposed.</p> |
