发明名称 DISPLACEMENT DETECTOR AND DISPLACEMENT DETECTION METHOD
摘要 <p>PROBLEM TO BE SOLVED: To provide a displacement detector capable of detecting the displacement of a measuring object with a simple configuration.SOLUTION: The displacement detector 3 includes: a retroreflector 31 disposed in a probe; a light source unit 32 for emitting irradiation light L1 capable of irradiating a predetermined range A toward the retroreflector 31; a beam splitter 33 that is disposed between the retroreflector 31 and the light source unit 32, transmits the irradiation light L1, and reflects the reflected light L2 reflected by the retroreflector 31; and a light receiving unit 34 for receiving the reflected light L3 reflected by the beam splitter 33.</p>
申请公布号 JP2015169491(A) 申请公布日期 2015.09.28
申请号 JP20140043576 申请日期 2014.03.06
申请人 MITSUTOYO CORP 发明人 MIKI YUTAKA
分类号 G01B11/00 主分类号 G01B11/00
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