PLASMA-BASED MATERIAL MODIFICATION USING PLASMA SOURCE WITH MAGNETIC CONFINEMENT

摘要

PROBLEM TO BE SOLVED: To provide a plasma-based material modification system in which system reliability and process control are improved by preventing neutral species from a plasma source from flowing into a process chamber.SOLUTION: A plasma-based material modification system 200 includes: a process chamber 204 in which a support structure 208 for supporting a work piece 206 is disposed; and a plasma source chamber 202 coupled to the process chamber 204. The plasma source chamber 202 includes a first plurality of magnets 210, a second plurality of magnets 212, and a third plurality of magnets 214 that surround a plasma generation region 232. The third plurality of magnets 214 are configured to confine a majority of electrons of plasma 220 having energy greater than 10 eV within the plasma generation region 232 while allowing ion beam 234 generated from the plasma 220 to pass into the process chamber 204.