MANUFACTURING METHOD OF VIBRATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a vibration device capable of preventing a reduction in aging characteristics due to annealing treatment while enhancing work efficiency of a drying step of an adhesive of a vibration piece.SOLUTION: A manufacturing method of a vibration device includes: a step S101 of connecting a crystal vibration element 10 serving as a vibration piece to a package 20 by a conductive adhesive 17; a drying step S102 of drying the conductive adhesive 17; and an annealing step S105 of performing annealing treatment of the package 20 including the conductive adhesive 17. In the manufacturing method of the vibration device, the drying step S102 and the annealing step S105 are continuously performed in an inert gas atmosphere.