| 摘要 |
PROBLEM TO BE SOLVED: To provide a small micropump capable of handling gas and liquid, and generating stable pressure and flow rate.SOLUTION: A micropump 2 is a pump of a vane structure, and in a rotor 6, a groove communication passage 12 is formed, which can cancel volumetric change of each vane guide groove 7 with reciprocation of each vane 8. Magnetic attraction force always acts between a tip surface 8a of each vane 8 and a pump chamber inner peripheral surface 5a, and even in a low-speed rotation, sealability is ensured therebetween. |
