ELECTRON SCANNING MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide an electron scanning microscope mounting an energy filter achieving stable reduction in energy dispersion.SOLUTION: An electron scanning microscope including an electron source for generating an electron beam, an orbit disperser for dispersing the orbit of electrons having different energy in the electron beam, and a selection slit plate having selection slits for selecting the energy range of the dispersed electron beam, is further provided with a transmittance monitor for monitoring the transmittance of an electron beam transmitting through the selection slits.