| 摘要 |
PROBLEM TO BE SOLVED: To reduce a burden preliminarily preparing a reference image for pattern matching upon inspection of a substrate by a photograph image.SOLUTION: An image inspection device is configured to photograph a substrate upon conveying the substrate by a substrate conveyance robot; use the photograph image to inspect a quality of the substrate by pattern matching; detect (S4) a pseudo edge making an edge part linear with respect to a substrate image indicative of the substrate in the photograph image after the photograph image is subjected to binary processing and closing processing (S1 to S3); generate (S5) a reference image that has noise in the substrate image surrounded by the pseudo edge removed and is compared with the photograph image by the pattern matching. Thus, the reference image is generated from the photograph image, which in turn reduces a work burden preliminarily acquiring the reference image. |
