发明名称 TEST DEVICE, CALIBRATION DEVICE, CALIBRATION METHOD, AND TEST METHOD
摘要 PROBLEM TO BE SOLVED: To easily test a plurality of devices under test which include an optical interface.SOLUTION: A test device and a test method are provided. The test device includes: an optical test signal generation unit that generates an optical test signal; an optical signal supply unit that supplies an optical signal to a target device under test out of a plurality of devices under test; a first optical switch unit that selects an optical signal which is output by the target device under test, out of optical signals which are output by the plurality of devices under test; and an optical signal reception unit that receives the selected optical signal.
申请公布号 JP2015169524(A) 申请公布日期 2015.09.28
申请号 JP20140044152 申请日期 2014.03.06
申请人 ADVANTEST CORP 发明人 MASUDA SHIN;HARA HIDEO;YASUTAKA TAKESHI
分类号 G01R31/28;H01L21/66 主分类号 G01R31/28
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