| 摘要 |
PROBLEM TO BE SOLVED: To provide a MEMS device which can inhibit the contact of an object to a pressure-sensitive section.SOLUTION: According to one embodiment, an MEMS device includes a variable capacitor 100 including a lower electrode 21 fixed to a substrate 10 and a movable upper electrode 51 provided above the lower electrode, a pressure-sensitive section 70 covering the variable capacitor and connected to the upper electrode, configured to be displaced according to a pressure applied, and a protective structure 200 provided on an outer side of the pressure-sensitive section. |
