发明名称 PROCESSING METHOD OF PLATE-LIKE MATERIAL
摘要 <p>PROBLEM TO BE SOLVED: To provide a processing method of a plate-like material capable of determining the amount of deviation of a cut groove and a dividing scheduled line, by cutting while positioning a cutting blade at one position, and capable of determining the cutting amount or the diameter of the cutting blade.SOLUTION: A deviation detection step for forming a cutting groove slightly in a protective tape T for supporting the outer peripheral part of a plate-like material 10 or the plate-like material by means of a cutting blade 6 fed while indexing, when a cutting step is performed for a predetermined number of dividing scheduled lines, and detecting presence or absence of deviation by imaging the position of the cutting groove and the position of the dividing scheduled line by imaging means, is performed. In the deviation detection step, the cutting amount (ΔZ) by the cutting blade is determined according to a following formula, by the X coordinate (X0) of the center of rotation of the cutting blade when forming the cutting groove, the coordinate (X1) of the end point of the cutting groove and the radius (R) of the cutting blade.</p>
申请公布号 JP2015170805(A) 申请公布日期 2015.09.28
申请号 JP20140046400 申请日期 2014.03.10
申请人 DISCO ABRASIVE SYST LTD 发明人 MIYATA SATOSHI
分类号 H01L21/301;B24B27/06;B24B41/06;B24B49/12 主分类号 H01L21/301
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