| 摘要 |
PROBLEM TO BE SOLVED: To provide a mask on which high-precision patterns can be easily formed, and to provide a pattern forming method.SOLUTION: According to one embodiment, a mask includes a first pattern portion and an intermediate member. The first pattern portion includes a plurality of first light transmission parts disposed periodically and having transmissivity with respect to light, and first shielding parts provided between the plurality of first light transmission parts and having a transmittance with respect to the light lower than a transmittance of the plurality of first light transmission parts. The intermediate member is provided on the first pattern portion. The intermediate member has a thickness in accordance with the wavelength of the light and a first period of the first light transmission parts. |
