| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a contact type displacement gauge that can be downsized in a direction orthogonal to a movement direction of a contact probe.SOLUTION: A scale 50 is configured to be irradiated with non-collimated light by a light projector 30, and the non-collimated light passing through N slits s of n slits s of the scale 50 is configured to be received by a light reception unit 40. A light reception signal indicative of a distribution of an amount of light reception is configured to be output, and N peak positions where the amount of light reception in the distribution thereof at the light reception unit 40 is maximum or minimal on the basis of the light reception signal are configured to be detected. A magnification of an interval between a plurality of peak positions and an interval between a plurality of slit positions corresponding to each interval therebetween is configured to be plurally calculated, and a slit corresponding to at least one peak position is configured to be identified. An absolute position of the scale 50 is configured to be calculated on the basis of the magnification corresponding to the identified slit, and the absolute position to be calculated in a state where the scale 50 tilts with respect to one direction is configured to be corrected to the absolute position to be calculated in a state where the scale 50 does not tilt with respect to one direction.</p> |
