发明名称 P-PYPE AMORPHOUS OXIDE SEMICONDUCTOR COMPRISING GALLIUM, AND METHOD OF MANUFACTURING THE SAME
摘要 The present invention relates to a p-type amorphous oxide semiconductor including gallium and a manufacturing method thereof, capable of simply manufacturing the p-type amorphous oxide semiconductor including gallium by a solution process by a gallium concentration ratio. More particularly, the present invention relates to the p-type oxide semiconductor additionally combining Ga with a bond of one or more selected among Cus, SnO, ITO, IZTO, and IZO, and the manufacturing method thereof. The p-type oxide semiconductor according to the present invention implements a manufacturing process with low temperatures and low costs through easily manufacturing the p-type oxide semiconductor by the solution process, obtains a crystalline or amorphous thin film by the gallium concentration ratio, and implements a thin film transistor with high performance and high mobility.
申请公布号 KR20150108168(A) 申请公布日期 2015.09.25
申请号 KR20140031015 申请日期 2014.03.17
申请人 UNIVERSITY-INDUSTRY COOPERATION GROUP OF KYUNG HEE UNIVERSITY 发明人 JANG, JIN;CHRISTOPHE AVIS
分类号 H01L29/786;H01L21/20;H01L21/335 主分类号 H01L29/786
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