VACUUM PUMP WITH ABATEMENT FUNCTION

摘要

The purpose of the present invention is to provide a vacuum pump with an abatement function which prevents contamination of a process chamber without allowing products generated by an exhaust gas treatment to flow back to the process chamber; and reduces an amount of gas to be treated without allowing purge gas and diluent gas to be contained in the exhaust gas; thereby achieving energy saving by reducing the amount of energy required for the exhaust gas treatment in an abatement part. The abatement part to treat the exhaust gas is attached to a vacuum pump with an abatement function. The vacuum pump with the abatement function comprises a dry vacuum pump having a main pump (1) capable of evacuating gas from an atmospheric pressure, and a booster pump (2) to increase an evacuation speed of the main pump (1). At least one abatement part (3) to treat the exhaust gas is connected between the main pump (1) and the booster pump (2).