ELECTRONIC DEVICE AND MANUFACTURING METHOD OF THE SAME

摘要

According to one embodiment, there is provided a manufacturing method of an electronic device including a lower electrode, a source electrode and a drain electrode made of a nanoparticulate conductive material on a substrate, an organic semiconductor layer between the source and drain electrodes, and a gate electrode on the organic semiconductor layer via a gate insulating layer. The manufacturing method includes forming a nonphotosensitive resin layer as the gate insulating layer on the organic semiconductor layer and on the lower electrode, forming a photosensitive resin layer as the gate insulating layer on the nonphotosensitive resin layer, and forming a through hole in the photosensitive resin layer on the lower electrode.

主权项

1. A manufacturing method of an electronic device comprising a lower electrode, a source electrode and a drain electrode made of a nanoparticulate conductive material on a substrate, comprising an organic semiconductor layer between the source electrode and the drain electrode, and comprising a gate electrode on the organic semiconductor layer via a gate insulating layer, the method comprising:
forming a non-photosensitive resin layer as the gate insulating layer on the organic semiconductor layer and the lower electrode; forming a photosensitive resin layer as the gate insulating layer on the non-photosensitive resin layer; and forming a through hole in the photosensitive resin layer on the lower electrode.