STRAIN DETECTING ELEMENT, PRESSURE SENSOR AND MICROPHONE

摘要

According to one embodiment, the pressure sensor includes a supporting portion, a film portion, and a strain detecting element. The film portion is supported by the supporting portion. The strain detecting element is disposed on a part of the film portion. The strain detecting element includes a first magnetic layer, a second magnetic layer, and an intermediate layer. A magnetization direction of the first magnetic layer is variable according to a deformation of the film portion. The first magnetic layer has a first facing surface. The second magnetic layer has a second facing surface. The second facing surface faces the first facing surface. The intermediate layer is disposed between the first magnetic layer and the second magnetic layer. An area of the first facing surface is larger than an area of the second facing surface.

主权项

1. A pressure sensor, comprising:
a supporting portion; a film portion supported by the supporting portion; and a strain detecting element disposed on a part of the film portion, wherein the strain detecting element includes: a first magnetic layer whose magnetization direction is variable according to a deformation of the film portion, the first magnetic layer having a first facing surface; a second magnetic layer that has a second facing surface, the second facing surface facing the first facing surface; and an intermediate layer disposed between the first magnetic layer and the second magnetic layer, an area of the first facing surface being larger than an area of the second facing surface.