| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe assembly having excellent reliability without causing a contact failure nor a damage, and a polishing device using the probe assembly.SOLUTION: A probe 3 constituting a probe assembly has a probe electrode 31 at a tip part and is attached to a holder 1. In a film 5, one end side is supported by the holder 1 and the other end side is located under the probe electrode 31. The probe assembly is used in a polishing device, a measuring instrument, or the like. The polishing device is brought into contact with an electrode of an object to be polished to control a polishing amount of the object to be polished while receiving electric resistance, and has a polishing tray and the probe assembly. When the probe assembly is lowered to the polishing tray, the film 5 is located between the probe electrode 31 and the polishing tray. |
