发明名称 |
SLOT DIE COATER AND COATING METHOD USING THE SAME |
摘要 |
The present invention relates to a slot die coater preventing contamination of another layer contacting a coating layer, and a coating method using the same. The slot die coater according to an exemplary embodiment of the present invention includes a slit nozzle configured to deposit a photo-curable material upon a substrate, and an exposure unit coupled to the slit nozzle and positioned adjacent thereto, the exposure unit configured to irradiate light upon the photo-curable material deposited upon the substrate. |
申请公布号 |
US2015266044(A1) |
申请公布日期 |
2015.09.24 |
申请号 |
US201414493060 |
申请日期 |
2014.09.22 |
申请人 |
Samsung Display Co., Ltd. |
发明人 |
PARK Jae Cheol;KIM Yeun Tae;EOH Gyeong Eun;SONG Dae Ho;OH Min Jeong;LEE Jun Heui |
分类号 |
B05B15/06;H01L21/02;H01L27/12;B05B1/04 |
主分类号 |
B05B15/06 |
代理机构 |
|
代理人 |
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主权项 |
1. A slot die coater comprising:
a slit nozzle configured to deposit a photo-curable material upon a substrate; and an exposure unit coupled to the slit nozzle and positioned adjacent thereto, the exposure unit configured to irradiate light upon the photo-curable material deposited upon the substrate. |
地址 |
Yongin-City KR |