发明名称 SLOT DIE COATER AND COATING METHOD USING THE SAME
摘要 The present invention relates to a slot die coater preventing contamination of another layer contacting a coating layer, and a coating method using the same. The slot die coater according to an exemplary embodiment of the present invention includes a slit nozzle configured to deposit a photo-curable material upon a substrate, and an exposure unit coupled to the slit nozzle and positioned adjacent thereto, the exposure unit configured to irradiate light upon the photo-curable material deposited upon the substrate.
申请公布号 US2015266044(A1) 申请公布日期 2015.09.24
申请号 US201414493060 申请日期 2014.09.22
申请人 Samsung Display Co., Ltd. 发明人 PARK Jae Cheol;KIM Yeun Tae;EOH Gyeong Eun;SONG Dae Ho;OH Min Jeong;LEE Jun Heui
分类号 B05B15/06;H01L21/02;H01L27/12;B05B1/04 主分类号 B05B15/06
代理机构 代理人
主权项 1. A slot die coater comprising: a slit nozzle configured to deposit a photo-curable material upon a substrate; and an exposure unit coupled to the slit nozzle and positioned adjacent thereto, the exposure unit configured to irradiate light upon the photo-curable material deposited upon the substrate.
地址 Yongin-City KR