FLEXIBLE, STRETCHABLE ELECTRONIC DEVICES

摘要

Fabrication methods are disclosed that facilitate the production of electronic structures that are both flexible and stretchable to conform to non-planar (e.g. curved) surfaces without suffering functional damage due to excessive strain. Electronic structures including CMOS devices are provided that can be stretched or squeezed within acceptable limits without failing or breaking. The methods disclosed herein further facilitate the production of flexible, stretchable electronic structures having multiple levels of intra-chip connectors. Such connectors are formed through deposition and photolithographic patterning (back end of the line processing) and can be released following transfer of the electronic structures to flexible substrates.

主权项

1. A flexible electronic device comprising:
a structure including:
an electrically insulating layer having a first side and a second side;a circuitry layer comprising first and second CMOS circuitry regions adjoining a first side of the electrically insulating layer;a first layer comprising electrically insulating material on the circuitry layer;a space extending within the first layer and between the first and second CMOS circuitry regions, andan electrical connector layer electrically connecting the first and second circuitry regions, the electrical connector layer extending within the first layer and including a wire extending across the space, and a flexible substrate attached to the structure on the second side of the electrically insulating layer.