SEMICONDUCTOR INSPECTING APPARATUS AND METHOD OF INSPECTING AND MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME

摘要

A method of manufacturing a semiconductor device includes: preparing a semiconductor device comprising a first substrate, a second substrate disposed on the first substrate, inner terminals disposed between the first and second substrates, and a filling material disposed between the first and second substrates and between the inner terminals; loading the semiconductor device on a stage; irradiating an electromagnetic wave to the filling material in a direction parallel to a top surface of the first substrate by an electromagnetic wave generating unit; and scanning the filling material as the electromagnetic wave generating unit is moved in relation to the stage in a direction along a first side of the semiconductor device while maintaining the irradiating direction of the electromagnetic wave.

主权项

1. A method of manufacturing a semiconductor device, the method including:
preparing a first substrate; preparing a second substrate; connecting the first substrate to the second substrate through interconnection terminals disposed between the first substrate and the second substrate; depositing a filling material in spaces between the first substrate and second substrate, the filling material filling spaces between terminals of the interconnection terminals, wherein the first substrate, second substrate, interconnection terminals, and filling material form a semiconductor device; and performing an inspection of the semiconductor device, the inspection including: loading the semiconductor device on a stage; irradiating an electromagnetic wave to the filling material in a first direction parallel to a top surface of the first substrate by an electromagnetic wave generator; and scanning the filling material by moving the electromagnetic wave generator with respect to the stage along a first side of the semiconductor device while maintaining the first irradiating direction of the electromagnetic wave EM.