REDUCTION OF SiCl4 IN THE PRESENCE OF BCl3

摘要

The present invention relates, in general, to the purification of boron trichloride (BCl3). More particularly, the invention relates to a process for minimizing silicon tetrachloride (SiCl4) formation in BCl3 production and/or the removal of SiCl4 in BCl3 product stream by preventing/minimizing the silicon source in the reaction chambers. In addition, a hydride material may be used to convert any SiCl4 present to SiH4 which is easier to remove. Lastly freeze separation would replace fractional distillation to remove SiCl4 from BCl3 that has been partially purified to remove light boilers.

主权项

1. A process for producing boron trichloride while reducing the formation of silicon tetrachloride and other silicon chlorides as an impurity, comprising:
packing a non-reactive column having an inner surface, with boron carbide (B4C) and optionally a reactive material or an adsorbent material or both that are in contact with said inner surface; passing a chlorine gas through said non-reactive column; and recovering a gaseous boron trichloride product.