| 摘要 |
[Problem] To provide a thermal mass-flow meter in which, even when working with a condensing gas that needs to be heated to 250°C, said gas does not re-liquefy or condense inside a sensor tube. Also, to provide a mass-flow control device using said thermal mass-flow meter. [Solution] This thermal mass-flow meter, which has a case that contains a sensor tube and a sensor wire and is provided so as to contact a mounting surface of a base, is provided with a heat-transfer block that comprises a good conductor of heat and is in surface contact with both the mounting surface of the base and a side surface of the case. In a preferred embodiment, a temperature-regulating block provided so as to contact a side surface of the base is also provided. |
