GAP-MAINTAINING METHOD, GAP-MAINTAINING DEVICE, AND COATING DEVICE

摘要

A coating device (1) comprising a coating apparatus (5) that coats a substrate (W) with a coating liquid, wherein a gap between the substrate (W) and a discharge port (7a) of the coating apparatus (5) can be kept uniform with high precision and coating can be performed while preventing the occurrence of control operation delays. This gap-maintaining method involves measuring a gap that is formed between: an end part of a reference surface (17) of a protective block (16) provided further towards a pre-coating side of the substrate (W) than the discharge port (7a); and a section, which opposes the end part, of a surface (K) to be coated of the substrate (W). Subsequently, as the section, which was opposing the end part, of the surface (K) to be coated reaches a position opposing the discharge port (7a) as a result of the substrate (W) moving, a gap formed between the discharge port (7a) and the section of the surface (K) to be coated maintains uniformity due to the coating apparatus (5) being moved in the direction orthogonal to the surface (K) to be coated and on the basis of the measured gap.