LASER PROCESSING DEVICE HAVING FUNCTION FOR MONITORING PROPAGATION OF LASER BEAM

摘要

A laser processing device having a simple structure and a means for accurately detecting expansion and misalignment of a laser beam. A sensor, which receives the laser beam after transmitting through a half mirror, is arranged on a back surface of the half mirror opposed to a front surface which reflects the laser beam. The sensor is positioned via a heat insulating material between the back surface of the half mirror and a shield plate for shielding or absorbing the laser beam after transmitting through the half mirror, so that the sensor is thermally-independent from the other components. The sensor is positioned so that the sensor does not receive the laser beam after transmitting through the half mirror in the normal state, and so that the sensor directly receives the laser beam after transmitting through the half mirror when the laser beam is expanded or misaligned.

主权项

1. A laser processing device comprising:
a laser oscillator; a beam path through which a laser beam, which is output from the laser oscillator, transmits; and at least one reflecting mirror positioned in the beam path, the laser beam propagating within the beam path, wherein the at least one reflecting mirror includes at least one half mirror, and at least one sensor is arranged on a surface of the half mirror opposed to a surface where the laser beam is reflected, the sensor being configured to receive the laser beam after transmitting through the half mirror, and wherein the sensor is positioned so that the sensor does not receive the laser beam in a normal state, and so that the sensor receives the laser beam when the laser beam is expanded relative to the normal state or when a beam axis of the laser beam is misaligned relative to the normal state.