MONOLITHIC, MULTI-AXIS FORCE SENSOR

摘要

A monolithic, multi-axis force sensor can be in the form of a laminated structure including a scaffold; a plurality of arms extending within and across the scaffold at distinct angles, wherein the arms include a structural support layer, a sensor layer including a strain-gauge alloy, and a flexible and electrically insulating polymer layer sandwiched between the structural support layer and the sensor layer in a monolithic, multi-layered laminate structure; and electrically conductive pathways positioned to deliver a voltage through the strain-gauge alloy in the arms.