发明名称 光学素子の製造方法
摘要 Provided is a method of manufacturing an optical element having a structure, which is represented by a one-dimensional lattice, with high yield with the use of a sol-gel material. A titanium based sol-gel material is applied onto a substrate (1), and then is subjected to vacuum drying to form a titania sol layer (2) corresponding to a dried sol-gel film. Onto the titania sol layer (2), a line-and-space structure is transferred by embossing using a mold (3), and then the mold (3) is separated. Thus, a titania sol layer (4) having the structure is formed. Next, heating is performed to accelerate the dehydration condensation reaction of the sol-gel material to cure the sol-gel material, and thus a titanium oxide structure portion (5) having the line-and-space structure is formed.
申请公布号 JP5783714(B2) 申请公布日期 2015.09.24
申请号 JP20100281488 申请日期 2010.12.17
申请人 キヤノン株式会社 发明人 坂本 淳一;寺田 順司;久松 雅哉
分类号 C03C17/25;B29C59/02;G02B1/10 主分类号 C03C17/25
代理机构 代理人
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