MANUFACTURING APPARATUS CONTROL SYSTEM AND MANUFACTURING APPARATUS CONTROL METHOD

摘要

According to one embodiment, a manufacturing apparatus control system includes a defect rate detector, a significant difference tester and a defect determining unit. The defect rate detector extracts a first apparatus passage history having a first defect rate. The defect rate detector detects a third defect rate by excluding a second apparatus passage history having a second defect rate from the first apparatus passage history. The significant difference tester calculates a significant difference test value. The defect determining unit extracts a third apparatus passage history based on the third defect rate and the significant difference test value.

主权项

1. A manufacturing apparatus control system, comprising:
a defect rate detector extracting a first apparatus passage history and detecting a third defect rate by excluding a second apparatus passage history from the first apparatus passage history, the first apparatus passage history having a first defect rate, the second apparatus passage history having a second defect rate; a significant difference tester calculating a significant difference test value; and a defect determining unit extracting a third apparatus passage history based on the third defect rate and the significant difference test value.