发明名称 ORDERING BLOCK COPOLYMERS
摘要 A method for ordering block copolymers including forming a first layer having a first preference mode; and providing a reactive agent in selected regions of the first layer that modifies the selected regions to a second preference mode, wherein the selected regions define other regions of the first layer retaining the first preference mode thereby forming an alignment layer for block copolymers.
申请公布号 WO2015142641(A1) 申请公布日期 2015.09.24
申请号 WO2015US20417 申请日期 2015.03.13
申请人 BOARD OF REGENTS, THE UNIVRSITY OF TEXAS SYSTEM 发明人 WILLSON, CARLTON, GRANT;ELLISON, CHRISTOPHER;MAHER, MICHAEL;BATES, CHRISTOPHER;JANES, DUSTIN
分类号 G03F7/00;C09D153/00 主分类号 G03F7/00
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