发明名称 合焦対物レンズの可動な重量相殺サスペンションのための装置を具備するレーザシステム
摘要 An apparatus for the weight-compensating movable suspension of a focussing objective (12) of a laser device (10) comprises a force generating arrangement for generating a counterforce component (G) counteracting the weight force of the focussing objective (12), a transmitting arrangement that transmits the counterforce component (G) to the focussing objective (12) and as an up/down compensation movement of the focussing objective, and a guide arrangement for movably guiding the focussing objective, in such a way that during an up/down compensation movement of the focussing objective (12) an optical axis (O) thereof maintains at least its spatial orientation and preferably its spatial position.
申请公布号 JP5785197(B2) 申请公布日期 2015.09.24
申请号 JP20120555297 申请日期 2010.03.03
申请人 バーフェリヒト ゲゼルシャフト ミット ベシュレンクテル ハフツング 发明人 ロブル ゲルハルト
分类号 A61F9/008 主分类号 A61F9/008
代理机构 代理人
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